Wafer Thickness Estimation at a Major Semiconductor Company

Wafer Thickness Estimation at a Major Semiconductor Company

Application Description:

The Challenge

  • Yield Improvement of Wafer during manufacturing process has a significant ROI potential: Every percentage point is valuable and has high $ impact
  • Wafer film thickness in a specified range determines the yield during the process Producing desired thickness depends on accurately measuring thickness during the CMP process and stopping just in time

Canopus Contributions

  • Given a known data set of spectrum response and the corresponding thickness value, we build a model to estimate the thickness of the wafer film

Benefits Realized

  • The yield was improved by 7%. It was the best improvement in face of competition.

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